Reserve in Institutional Cleanroom Site. Ask to move it in room A2600 after reservation. The micro probe station will have the following capabilities: - Control of the temperature between +20 and +200C (+/-0.1C) (you can defined temperature profiles, cycles) - You can control the temperature down to -40C, but the chamber need to be plug on a cooling system. - Control of the humidity between 0 and 99%RH (+/-0.01RH) (you can define humidity profiles, cycles) - Control of the input of any 2 non corrosive gas (using MFC) (before using a new gas you will need to check if with us before) - 6 probes - Frequency range : DC-30MHz (DC-300MHz if correctly de-embedded) - Maximum voltage: 100V (500V absolute maximum) - Maximum current: 0.5A (1A absolute maximum) - Sample size is limited to 18x18mm (this is due to the dimensions of the peltier cell, if you do not wish to use heating bigger samples can be used) - Connection to outside is with SMA connectors The main applications can be: - MEMS testing (as it is compatible with the vibrometer) - Sensor testing (humidity, temperature, gas) - Coating testing (humidity, gas)