

The Hitachi SU-9000 is a premium cold field-emission scanning electron microscope (CFE-SEM) and scanning transmission electron microscope (STEM) system, recognized for its ultra-high resolution imaging and advanced analytical capabilities. It achieves a remarkable resolution of 0.16 nm at 30 keV in BF mode and 0.4 nm in SE mode, offering lattice resolution and exceptional performance at low beam energy. The instrument is equipped with Energy Dispersive Spectroscopy (EDS) and Electron Energy-Loss Spectroscopy (EELS), along with Convergent Beam Electron Diffraction (CBED). It provides a maximum probe current of 10-30 nA and features in-lens SE/BSE detectors with energy filtration (Upper and Top det.), a STEM BF detector with apertures, and a solid-state ADF/HAADF detector with 4 quadrants and adjustable collection angles. Analytical components include an Oxford Instrument windowless Extreme 100 mm² SDD and a 1600 x 1200 CDD for CBED. It supports low voltage STEM-EELS (20, 30 kV) and incorporates downstream eCloud in-situ cleaning. External control is available via Hitachi High-Tech Azorus software.

Faculty of Engineering
Research lab focused on advancing scientific knowledge and innovation.
The Hitachi SU-9000 is a premium cold field-emission scanning electron microscope (CFE-SEM) and scanning transmission electron microscope (STEM) system, recognized for its ultra-high resolution imaging and advanced analytical capabilities. It achieves a remarkable resolution of 0.16 nm at 30 keV in BF mode and 0.4 nm in SE mode, offering lattice resolution and exceptional performance at low beam energy. The instrument is equipped with Energy Dispersive Spectroscopy (EDS) and Electron Energy-Loss Spectroscopy (EELS), along with Convergent Beam Electron Diffraction (CBED). It provides a maximum probe current of 10-30 nA and features in-lens SE/BSE detectors with energy filtration (Upper and Top det.), a STEM BF detector with apertures, and a solid-state ADF/HAADF detector with 4 quadrants and adjustable collection angles. Analytical components include an Oxford Instrument windowless Extreme 100 mm² SDD and a 1600 x 1200 CDD for CBED. It supports low voltage STEM-EELS (20, 30 kV) and incorporates downstream eCloud in-situ cleaning. External control is available via Hitachi High-Tech Azorus software.



Faculty of Engineering
Research lab focused on advancing scientific knowledge and innovation.
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