Capable of depositing a wide range of materials such as organics, Au, Cu, Cr, Al, Ag, and dielectrics, with up to 3 simultaneous sources on up to 6” wafers.

Polytechnique Montréal
Research lab focused on advancing scientific knowledge and innovation.
Capable of depositing a wide range of materials such as organics, Au, Cu, Cr, Al, Ag, and dielectrics, with up to 3 simultaneous sources on up to 6” wafers.

Polytechnique Montréal
Research lab focused on advancing scientific knowledge and innovation.
Discover more resources that could support your research