EquipmentAvailable
Plasma Pod-RIE_ Plasma therm
Faculté de génie
École de technologie supérieure (ETS)
The Plasma-Term model Plasma pad machine can be used as a plasma asher, to clean substrates or as an RIE (reactive ion etcher). the chamber can hold subtrates up to a diameter of 180mm (6 inches) and a height of 105mm (4.1 inches). For now only oxygen and argon are available. We will later have CF4.
LaCIME - communications et microélectronique
Faculté de génie
Research lab focused on advancing scientific knowledge and innovation.
MG
Mathieu Gratuze
Faculté de génie
École de technologie supérieure (ETS)
EquipmentAvailable
Plasma Pod-RIE_ Plasma therm
Faculté de génie
École de technologie supérieure (ETS)
The Plasma-Term model Plasma pad machine can be used as a plasma asher, to clean substrates or as an RIE (reactive ion etcher). the chamber can hold subtrates up to a diameter of 180mm (6 inches) and a height of 105mm (4.1 inches). For now only oxygen and argon are available. We will later have CF4.
LaCIME - communications et microélectronique
Faculté de génie
Research lab focused on advancing scientific knowledge and innovation.
MG
Mathieu Gratuze
Faculté de génie
École de technologie supérieure (ETS)
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