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EquipmentAvailable
AM5000 Plasma-Enhanced Chemical Vapor Deposition (PECVD) System
Faculty of Science
Physics
McGill University
Plasma-Enhanced Chemical Vapor Deposition (PECVD) system. Available materials include: SiO2, Si3N4.
McGill Nanotools Micro- and Nanofabrication Facility
Faculty of Science
Research lab focused on advancing scientific knowledge and innovation.
ZL
Zhao Lu
EquipmentAvailable
AM5000 Plasma-Enhanced Chemical Vapor Deposition (PECVD) System
Faculty of Science
Physics
McGill University
Plasma-Enhanced Chemical Vapor Deposition (PECVD) system. Available materials include: SiO2, Si3N4.
McGill Nanotools Micro- and Nanofabrication Facility
Faculty of Science
Research lab focused on advancing scientific knowledge and innovation.
ZL
Zhao Lu
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