
The Hitachi Cold FE SU-8000 is a state-of-the-art Cold Field Emission Scanning Electron Microscope (SEM) known for its ultra-high resolution, achieving 0.5 nm at 30 kV and 2 nm at 0.2 kV. It features an extensive array of 7 detectors, including a secondary electron (SE) lower detector, SE/BSE upper detector, SE/BSE top detector with energy filtration, a five-quadrant BSE detector, a STEM (Scanning Transmission Electron Microscopy) detector for bright/dark field imaging, an SDD EDS Detector, and an EBSD camera. With a maximum probe current of 30nA, it facilitates quantitative x-ray microanalysis at low voltage and in STEM mode, making it ideal for advanced nanoscale characterization.

Faculty of Engineering
Research lab focused on advancing scientific knowledge and innovation.
The Hitachi Cold FE SU-8000 is a state-of-the-art Cold Field Emission Scanning Electron Microscope (SEM) known for its ultra-high resolution, achieving 0.5 nm at 30 kV and 2 nm at 0.2 kV. It features an extensive array of 7 detectors, including a secondary electron (SE) lower detector, SE/BSE upper detector, SE/BSE top detector with energy filtration, a five-quadrant BSE detector, a STEM (Scanning Transmission Electron Microscopy) detector for bright/dark field imaging, an SDD EDS Detector, and an EBSD camera. With a maximum probe current of 30nA, it facilitates quantitative x-ray microanalysis at low voltage and in STEM mode, making it ideal for advanced nanoscale characterization.


Faculty of Engineering
Research lab focused on advancing scientific knowledge and innovation.
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