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Located in MEMS cleanroom A2543, the Picomaster 100 is a UV direct laser writer for maskless lithography. 405nm laser diode. Min 0.3um feature size. 4095 levels of greyscale. Spotsize of 0.3, 0.6 and 0.9um. Exposable area 100mm. Max substrate size 125mm, min 5mm. Max speed 200mm/s.
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