
The Hitachi High-Technologies Ethos NX5000 is a cutting-edge Focused Ion and Electron Beam (FIB-SEM) system, designed for high-precision micro- and nanofabrication, site-specific sample preparation, and advanced analytical characterization. This dual-beam system integrates ion and electron optics for seamless imaging, milling, and analysis of a wide range of materials, making it ideal for semiconductor research, materials science, and failure analysis.
✅ Dual-Beam System – Combines focused ion beam (FIB) and scanning electron microscopy (SEM) for high-precision imaging and microstructuring.
✅ Oxford Instruments Ultim Max SDD – Large-area silicon drift detector (SDD) for high-throughput Energy Dispersive X-ray Spectroscopy (EDS).
✅ AZtec 3D EDS – Advanced software suite for three-dimensional elemental mapping and in-depth compositional analysis.
✅ AZtecCrystal EBSD – Electron Backscatter Diffraction (EBSD) system for detailed crystallographic characterization.
This system is ideal for researchers requiring precise nanofabrication, high-resolution imaging, and advanced material characterization.

Faculty of Science
Research lab focused on advancing scientific knowledge and innovation.
The Hitachi High-Technologies Ethos NX5000 is a cutting-edge Focused Ion and Electron Beam (FIB-SEM) system, designed for high-precision micro- and nanofabrication, site-specific sample preparation, and advanced analytical characterization. This dual-beam system integrates ion and electron optics for seamless imaging, milling, and analysis of a wide range of materials, making it ideal for semiconductor research, materials science, and failure analysis.
✅ Dual-Beam System – Combines focused ion beam (FIB) and scanning electron microscopy (SEM) for high-precision imaging and microstructuring.
✅ Oxford Instruments Ultim Max SDD – Large-area silicon drift detector (SDD) for high-throughput Energy Dispersive X-ray Spectroscopy (EDS).
✅ AZtec 3D EDS – Advanced software suite for three-dimensional elemental mapping and in-depth compositional analysis.
✅ AZtecCrystal EBSD – Electron Backscatter Diffraction (EBSD) system for detailed crystallographic characterization.
This system is ideal for researchers requiring precise nanofabrication, high-resolution imaging, and advanced material characterization.


Faculty of Science
Research lab focused on advancing scientific knowledge and innovation.
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