Hitachi SU-3500 Variable Pressure Scanning Electron Microscope (VP-SEM)

The Hitachi SU-3500 is a versatile Variable Pressure Scanning Electron Microscope (VP-SEM) offering both high and low vacuum modes of operation. It provides high-resolution imaging, with SE resolution of 3nm at 30kV (high vacuum) and 7nm at 3kV (high vacuum). The system is equipped with various detectors, including BSE, SDD EDS (Energy Dispersive X-ray Spectroscopy), and EBSD (Electron Backscatter Diffraction). Its ultra-variable pressure capability and BSE detector allow for obtaining quantitative three-dimensional maps of specimen surfaces, enabling the analysis of complicated and/or rough surfaces, and imaging of non-conductive samples without metal coating.