The micro probe station is located in cleanroom A2564.It has the following capabilities: Control of the temperature between 20 and +200C (+/-0.1C) (you can defined temperature profiles, cycles) You can control the temperature down to -40C, but the chamber need to be plug on a cooling system. Control of the humidity between 0 and 99%RH (+/-0.01RH) (you can define humidity profiles, cycles) Control of the input of any 2 non corrosive gas (using MFC) (before using a new gas you will need to check if with us before) 6 probes Frequency range : DC-30MHz (DC-300MHz if correctly de-embedded) Maximum voltage: 100V (500V absolute maximum) Maximum current: 0.5A (1A absolute maximum) Sample size is limited to 18x18mm (this is due to the dimensions of the peltier cell, if you do not wish to use heating bigger samples can be used) Connection to outside is with SMA connectors The main applications can be: MEMS testing (as it is compatible with the vibrometer) Sensor testing (humidity, temperature, gas) Coating testing (humidity, gas)