Hitachi SU-8230 CFE-SEM/STEM

A cold field-emission scanning electron microscope (CFE-SEM) with integrated STEM capabilities, equipped with Energy Dispersive Spectroscopy (EDS) and Electron Backscatter Diffraction (EBSD). This instrument delivers high-resolution imaging, with a resolution of 0.4 nm at 30 keV and 3 nm at 0.05 keV, enabling detailed surface analysis and thin specimen work in STEM mode. It features a mild auto-flash for consistent brightness, high spatial resolution, and an improved signal-to-noise ratio. The maximum probe current is around 10-20 nA. Detection systems include in-lens SE/BSE detectors with energy filtration (Upper and Top det.), an in-chamber SE detector, and a solid-state photodiode BSE detector (5 quadrants). For STEM, it has a BF detector with apertures and a solid-state ADF/HAADF detector with adjustable collection angles. Analytical capabilities are supported by a Bruker XFlash 6|60 60mm² SDD 4 quadrants, a Bruker FlatQuad 5060F SDD (1.2 Sr), and a Bruker eFlash EBSD camera with ARGUS and OPTIMUS detectors. The system also includes downstream eCloud in-situ cleaning for sample maintenance.