Photolithography suite

Our photolithography suite in the RUCH 107 cleanroom covers a full patterning flow. The suite rate includes:

• JST solvent bench and spin coat station, with a CEE Model 200X-F spin coater and a hot plate for soft bake of spun-on materials.
• JST base bench for base chemistries: photoresist developer and stripper, potassium hydroxide, ammonium hydroxide and other chemicals with a pH above 7.
• Quintel Q-4000 contact aligner: UV patterning with contact or proximity printing, 1 micron resolution.
• OAI 5000 aligner.
• Semitool ST-460 spin-rinse-dryer: DI water rinse and nitrogen dry, 100 mm wafer tooling, two operating modes.

Each of our JST benches has a programmable hot plate.

The suite rate covers all five tools. Booked on their own, per hour: Quintel Q-4000 aligner $10 (Rate A), $15 (Rate B), $65 (Rate C); JST solvent bench and spin coat station $25, $36, $86; JST base bench $15, $22, $72; Semitool ST-460 spin-rinse-dryer $10, $15, $65.