Primary Function: The MicroWriter ML3 Baby Plus (Durham Magneto Optics) is a compact, high-performance direct-write optical lithography machine designed for rapid prototyping and small volume manufacturing in R&D laboratories and clean rooms.
Technical Specifications:
- Maximum Writing Area: 149mm x 149mm
- Supported Wafer Sizes: Up to 155mm x 155mm x 7mm
- Light Source: 405nm long-life semiconductor lightsource suitable for broadband, g- and h-line photoresists
- Optional Light Sources: 385nm and 365nm
- XY Interferometer Resolution: 15nm for precise motion control
- Fast Writing Speed (1µm minimum feature size): Up to 50mm²/minute
- Fast Writing Speed (5µm minimum feature size): Up to 180mm²/minute
- Additional Features: Autofocus system, high-quality optical microscope, grey scale exposure mode for 3-dimensional patterning, optical surface profilometer tool, automated wafer inspection tool.
Applications: Ideal for small-scale photolithography tasks, suitable for applications in microfluidics, MEMS, and semiconductor research.