Translated from French
Scanning electron microscope coupled with a focused ion beam: nanoscale imaging in high vacuum or low vacuum, ion milling, X-ray analysis, and platinum and gold nanodeposition.
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Our dual-beam microscope combines a field-emission electron gun with a focused gallium ion beam. It observes your samples at the nanoscale in high vacuum or low vacuum, mills nanoscale photonic structures while monitoring in real time, and analyzes their composition by X-ray spectroscopy.
It also deposits platinum and gold at the nanoscale. Ciena used it for the microcharacterization of its silicon chips.
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