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This is a thermal and E-beam evaporator installed in room A2564. It has 3 thermal source that can be used at the same time and they have their own thickness sensors. The E-beam has the possibility to hold 6x 7cc crucibles. It can handle substrates up to 6 inches. We now only have aluminium available. A cryopump can pump to 2e-6Torr in less than 30 minutes.
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