EMS Q150TS Sputter Coater/Evaporator

The EMS Q150TS (Q150TS Plus) is a turbomolecular pumped combined sputter coater and carbon evaporation system, designed for preparing specimens for electron microscopy. It is capable of achieving a vacuum of 5x10⁻⁵ mbar. The system supports sputtering of various metals, including Chromium (standard), Nickel, Gold, Platinum, Palladium, Iridium, Tungsten, Aluminum, Titanium, Copper, Iron, Cobalt, Tin, Molybdenum, Magnesium, Tantalum, and ITO. It can achieve a minimum coating thickness of 1.5 nm for sputtering and 5 nm for carbon evaporation. The Q150TS features a 50 mm Ø rotation stage with adjustable tilt and rotation (8-20 rpm), ensuring uniform coating. Its user-friendly interface includes a touch and swipe capacitive screen, capable of storing over 1000 recipes and providing a log of the last 1000 coatings. A USB port is available for upgrades and downloading process log files. This system is ideal for high-resolution SEM and FIB-SEM applications, creating protective layers, and carbon coating for elemental analysis and TEM grids.