
The EMS Q150TS (Q150TS Plus) is a turbomolecular pumped combined sputter coater and carbon evaporation system, designed for preparing specimens for electron microscopy. It is capable of achieving a vacuum of 5x10⁻⁵ mbar. The system supports sputtering of various metals, including Chromium (standard), Nickel, Gold, Platinum, Palladium, Iridium, Tungsten, Aluminum, Titanium, Copper, Iron, Cobalt, Tin, Molybdenum, Magnesium, Tantalum, and ITO. It can achieve a minimum coating thickness of 1.5 nm for sputtering and 5 nm for carbon evaporation. The Q150TS features a 50 mm Ø rotation stage with adjustable tilt and rotation (8-20 rpm), ensuring uniform coating. Its user-friendly interface includes a touch and swipe capacitive screen, capable of storing over 1000 recipes and providing a log of the last 1000 coatings. A USB port is available for upgrades and downloading process log files. This system is ideal for high-resolution SEM and FIB-SEM applications, creating protective layers, and carbon coating for elemental analysis and TEM grids.

Faculty of Engineering
Research lab focused on advancing scientific knowledge and innovation.
The EMS Q150TS (Q150TS Plus) is a turbomolecular pumped combined sputter coater and carbon evaporation system, designed for preparing specimens for electron microscopy. It is capable of achieving a vacuum of 5x10⁻⁵ mbar. The system supports sputtering of various metals, including Chromium (standard), Nickel, Gold, Platinum, Palladium, Iridium, Tungsten, Aluminum, Titanium, Copper, Iron, Cobalt, Tin, Molybdenum, Magnesium, Tantalum, and ITO. It can achieve a minimum coating thickness of 1.5 nm for sputtering and 5 nm for carbon evaporation. The Q150TS features a 50 mm Ø rotation stage with adjustable tilt and rotation (8-20 rpm), ensuring uniform coating. Its user-friendly interface includes a touch and swipe capacitive screen, capable of storing over 1000 recipes and providing a log of the last 1000 coatings. A USB port is available for upgrades and downloading process log files. This system is ideal for high-resolution SEM and FIB-SEM applications, creating protective layers, and carbon coating for elemental analysis and TEM grids.


Faculty of Engineering
Research lab focused on advancing scientific knowledge and innovation.
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