Angstrom Organic evaporator

This is an organic thermal evaporator installed in room A2564. It has 3 Radak and 1 thermal source that can be used at the same time with 2 QCM thickness sensors. The substrate holder can handle 16 substrates 1x1 inch and can be heated upi to 300 degree C. With a new substrate carrier it is possible to deposit on substrate up to 150x150mm. It can store up to 4 masks that are handle by a robot. A cryopump can pump in the e-8Torr.