§01
The Work
Keywords
microfabrication
nanofabrication
nanotechnology
microtechnology
lithography
thin-film deposition
+ 4 more
§02
Capabilities
41
WestBond 747677E Wire Bonder
Instrument
Wafer Bonder EVG501
Instrument
Dicing Saw DAD3240
Instrument
Everbeing C6 Probe Station
Instrument
Nanospec Reflectometer
Instrument
Sheet Resistance Measurement System
Instrument
DEKTAK-XT Stylus Profilometer
Instrument
Wyco Optical Profiler White Light Interferometer
Instrument
TESCAN VEGA3 XMH Scanning Electron Microscope (SEM)
Instrument
Olympus Optical Microscope 3
Instrument
Olympus Optical Microscope 2
Instrument
Zeiss Optical Microscope 1
Instrument
SCS 200 Parylene Coater
Instrument
AM5000 Plasma-Enhanced Chemical Vapor Deposition (PECVD) System
Instrument
VECCO Fiji G2 Atomic Layer Deposition (ALD) System
Instrument
Angstrom Engineering-Amode DC and RF Sputter System
Instrument
Denton Explore DC and RF Sputter System
Instrument
Angstrom Engineering-Nexdep E-beam Evaporator
Instrument
BJD 1800 E-beam Evaporator
Instrument
Ultrasonic Cleaner
Instrument
Lithography Solvent Cleaning Bench
Instrument
General Solvent Cleaning Bench
Instrument
KOH/TMAH Wet Etching Bench
Instrument
Acid/Base Wet Etching Bench
Instrument
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McGill Nanotools Micro- and Nanofabrication Facility
Explore shared research infrastructure
Fabrication in Montreal
Research infrastructure in Montreal
Core facilities at McGill University
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